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Journal: Micromachines, 2022
Volume: 13
Number: 1561

Article: High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area
Authors: by Stephan Barth, Tom Schreiber, Steffen Cornelius, Olaf Zywitzki, Thomas Modes and Hagen Bartzsch
Link: https://www.mdpi.com/2072-666X/13/10/1561

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