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Journal: Micromachines, 2022
Volume: 13
Number: 23
Article:
AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications
Authors:
by
Corina Bîrleanu, Marius Pustan, Florina Șerdean and Violeta Merie
Link:
https://www.mdpi.com/2072-666X/13/1/23
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