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Journal: Micromachines, 2022
Volume: 13
Number: 23

Article: AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications
Authors: by Corina Bîrleanu, Marius Pustan, Florina Șerdean and Violeta Merie
Link: https://www.mdpi.com/2072-666X/13/1/23

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