Article Versions Notes

Shubham S, Seo Y, Naderyan V, Song X, Frank AJ, Johnson JTMG, da Silva M, Pedersen M. A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions. Micromachines. 2022; 13(1):22. https://doi.org/10.3390/mi13010022

Shubham, Shubham, Yoonho Seo, Vahid Naderyan, Xin Song, Anthony J. Frank, Jeremy Thomas Morley Greenham Johnson, Mark da Silva, and Michael Pedersen. 2022. "A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions" Micromachines 13, no. 1: 22. https://doi.org/10.3390/mi13010022

Shubham, S., Seo, Y., Naderyan, V., Song, X., Frank, A. J., Johnson, J. T. M. G., da Silva, M., & Pedersen, M. (2022). A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions. Micromachines, 13(1), 22. https://doi.org/10.3390/mi13010022