Gao, C.; Zou, Y.; Zhou, J.; Liu, Y.; Liu, W.; Cai, Y.; Sun, C.
Influence of Etching Trench on of Film Bulk Acoustic Resonator. Micromachines 2022, 13, 102.
https://doi.org/10.3390/mi13010102
AMA Style
Gao C, Zou Y, Zhou J, Liu Y, Liu W, Cai Y, Sun C.
Influence of Etching Trench on of Film Bulk Acoustic Resonator. Micromachines. 2022; 13(1):102.
https://doi.org/10.3390/mi13010102
Chicago/Turabian Style
Gao, Chao, Yang Zou, Jie Zhou, Yan Liu, Wenjuan Liu, Yao Cai, and Chengliang Sun.
2022. "Influence of Etching Trench on of Film Bulk Acoustic Resonator" Micromachines 13, no. 1: 102.
https://doi.org/10.3390/mi13010102
APA Style
Gao, C., Zou, Y., Zhou, J., Liu, Y., Liu, W., Cai, Y., & Sun, C.
(2022). Influence of Etching Trench on of Film Bulk Acoustic Resonator. Micromachines, 13(1), 102.
https://doi.org/10.3390/mi13010102