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Journal: Micromachines, 2021
Volume: 12
Number: 1101

Article: The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing
Authors: by Siti Aisyah Zawawi, Azrul Azlan Hamzah, Burhanuddin Yeop Majlis and Faisal Mohd-Yasin
Link: https://www.mdpi.com/2072-666X/12/9/1101

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