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Journal: Micromachines, 2021
Volume: 12
Number: 1084
Article:
Understanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash Memories
Authors:
by
Sivaramakrishnan Ramesh, Arjun Ajaykumar, Lars-Åke Ragnarsson, Laurent Breuil, Gabriel Khalil El Hajjam, Ben Kaczer, Attilio Belmonte, Laura Nyns, Jean-Philippe Soulié, Geert Van den bosch and Maarten Rosmeulen
Link:
https://www.mdpi.com/2072-666X/12/9/1084
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