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Micromachines
Volume 12
Issue 8
10.3390/mi12080880
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Article

Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices

by
David Hoch
1,2,3,
Kevin-Jeremy Haas
1,
Leopold Moller
1,
Timo Sommer
1,2,
Pedro Soubelet
1,4,
Jonathan J. Finley
1,2,4 and
Menno Poot
1,2,3,*
1
Department of Physics, Technical University of Munich, 85748 Garching, Germany
2
Munich Center for Quantum Science and Technology (MCQST), 80799 Munich, Germany
3
Institute for Advanced Study, Technical University of Munich, 85748 Garching, Germany
4
Walter Schottky Institute, Technical University of Munich, 85748 Garching, Germany
*
Author to whom correspondence should be addressed.
Micromachines 2021, 12(8), 880; https://doi.org/10.3390/mi12080880
Submission received: 21 June 2021 / Revised: 21 July 2021 / Accepted: 22 July 2021 / Published: 27 July 2021
(This article belongs to the Special Issue Physical Microelectromechanical Systems (MEMS): Design, Modeling, Fabrication, and Characterization)
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Abstract

Visualizing eigenmodes is crucial in understanding the behavior of state-of-the-art micromechanical devices. We demonstrate a method to optically map multiple modes of mechanical structures simultaneously. The fast and robust method, based on a modified phase-lock loop, is demonstrated on a silicon nitride membrane and shown to outperform three alternative approaches. Line traces and two-dimensional maps of different modes are acquired. The high quality data enables us to determine the weights of individual contributions in superpositions of degenerate modes.
Keywords: optomechanics; mode-mapping; MEMS; phase-lock loop; silicon-nitride; membrane optomechanics; mode-mapping; MEMS; phase-lock loop; silicon-nitride; membrane

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MDPI and ACS Style

Hoch, D.; Haas, K.-J.; Moller, L.; Sommer, T.; Soubelet, P.; Finley, J.J.; Poot, M. Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices. Micromachines 2021, 12, 880. https://doi.org/10.3390/mi12080880

AMA Style

Hoch D, Haas K-J, Moller L, Sommer T, Soubelet P, Finley JJ, Poot M. Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices. Micromachines. 2021; 12(8):880. https://doi.org/10.3390/mi12080880

Chicago/Turabian Style

Hoch, David, Kevin-Jeremy Haas, Leopold Moller, Timo Sommer, Pedro Soubelet, Jonathan J. Finley, and Menno Poot. 2021. "Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices" Micromachines 12, no. 8: 880. https://doi.org/10.3390/mi12080880

APA Style

Hoch, D., Haas, K.-J., Moller, L., Sommer, T., Soubelet, P., Finley, J. J., & Poot, M. (2021). Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices. Micromachines, 12(8), 880. https://doi.org/10.3390/mi12080880

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