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Journal: Micromachines, 2021
Volume: 12
Number: 534
534
Article: Self-Controlled Cleaving Method for Silicon DRIE Process Cross-Section Characterization
Authors: by Dmitry A. Baklykov, Mihail Andronic, Olga S. Sorokina, Sergey S. Avdeev, Kirill A. Buzaverov, Ilya A. Ryzhikov and Ilya A. Rodionov
Link: https://www.mdpi.com/2072-666X/12/5/534

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