Article Versions Notes

Baracu AM, Dirdal CA, Avram AM, Dinescu A, Muller R, Jensen GU, Thrane PCV, Angelskår H. Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching. Micromachines. 2021; 12(5):501. https://doi.org/10.3390/mi12050501

Baracu, Angela M., Christopher A. Dirdal, Andrei M. Avram, Adrian Dinescu, Raluca Muller, Geir Uri Jensen, Paul Conrad Vaagen Thrane, and Hallvard Angelskår. 2021. "Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching" Micromachines 12, no. 5: 501. https://doi.org/10.3390/mi12050501

Baracu, A. M., Dirdal, C. A., Avram, A. M., Dinescu, A., Muller, R., Jensen, G. U., Thrane, P. C. V., & Angelskår, H. (2021). Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching. Micromachines, 12(5), 501. https://doi.org/10.3390/mi12050501