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Journal: Micromachines, 2021
Volume: 12
Number: 407

Article: Laser Processing of Transparent Wafers with a AlGaN/GaN Heterostructures and High-Electron Mobility Devices on a Backside
Authors: by Simonas Indrišiūnas, Evaldas Svirplys, Justinas Jorudas and Irmantas Kašalynas
Link: https://www.mdpi.com/2072-666X/12/4/407

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