Wolter, S.;                     Linek, J.;                     Altmann, J.;                     Weimann, T.;                     Bechstein, S.;                     Kleiner, R.;                     Beyer, J.;                     Koelle, D.;                     Kieler, O.    
        Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers. Micromachines 2021, 12, 350.
    https://doi.org/10.3390/mi12040350
    AMA Style
    
                                Wolter S,                                 Linek J,                                 Altmann J,                                 Weimann T,                                 Bechstein S,                                 Kleiner R,                                 Beyer J,                                 Koelle D,                                 Kieler O.        
                Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers. Micromachines. 2021; 12(4):350.
        https://doi.org/10.3390/mi12040350
    
    Chicago/Turabian Style
    
                                Wolter, Silke,                                 Julian Linek,                                 Josepha Altmann,                                 Thomas Weimann,                                 Sylke Bechstein,                                 Reinhold Kleiner,                                 Jörn Beyer,                                 Dieter Koelle,                                 and Oliver Kieler.        
                2021. "Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers" Micromachines 12, no. 4: 350.
        https://doi.org/10.3390/mi12040350
    
    APA Style
    
                                Wolter, S.,                                 Linek, J.,                                 Altmann, J.,                                 Weimann, T.,                                 Bechstein, S.,                                 Kleiner, R.,                                 Beyer, J.,                                 Koelle, D.,                                 & Kieler, O.        
        
        (2021). Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers. Micromachines, 12(4), 350.
        https://doi.org/10.3390/mi12040350