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Journal: Micromachines, 2021
Volume: 12
Number: 102

Article: A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers
Authors: by Yurong He, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning and Fuhua Yang
Link: https://www.mdpi.com/2072-666X/12/2/102

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