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Article

Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters

Department of Electrical and Electronic Engineering, Imperial College London, Exhibition Road, London SW7 2AZ, UK
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Author to whom correspondence should be addressed.
Academic Editors: Marius Pustan and Florina Maria Șerdean
Micromachines 2021, 12(10), 1191; https://doi.org/10.3390/mi12101191
Received: 6 September 2021 / Revised: 21 September 2021 / Accepted: 25 September 2021 / Published: 30 September 2021
(This article belongs to the Special Issue Advances in MEMS Theory and Applications)
Micro-electromechanical systems (MEMS) bandpass filters based on arrays of electrostatically driven coupled beams have been demonstrated at MHz frequencies. High performance follows from the high Q-factor of mechanical resonators, and electrostatic transduction allows tuning, matching and actuation. For high-order filters, there is a conflict between the transduction mechanism and the coupling arrangement needed for dynamic synchronization: it is not possible to achieve synchronization and tuning simultaneously using a single voltage. Here we propose a general solution, based on the addition of mass-loaded beams at the ends of the array. These beams deflect for direct current (DC) voltages, and therefore allow electrostatic tuning, but do not respond to in-band alternating current (AC) voltages and hence do not interfere with synchronization. Spurious modes generated by these beams may be damped, leaving a good approximation to the desired response. The approach is introduced using a lumped element model and verified using stiffness matrix and finite element models for in-plane arrays with parallel plate drives and shown to be tolerant of the exact mass value. The principle may allow compensation of fabrication-induced variations in complex filters. View Full-Text
Keywords: mechanical filter; coupled resonator; MEMS mechanical filter; coupled resonator; MEMS
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MDPI and ACS Style

Syms, R.; Bouchaala, A. Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters. Micromachines 2021, 12, 1191. https://doi.org/10.3390/mi12101191

AMA Style

Syms R, Bouchaala A. Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters. Micromachines. 2021; 12(10):1191. https://doi.org/10.3390/mi12101191

Chicago/Turabian Style

Syms, Richard, and Adam Bouchaala. 2021. "Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters" Micromachines 12, no. 10: 1191. https://doi.org/10.3390/mi12101191

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