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Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters

Department of Electrical and Electronic Engineering, Imperial College London, Exhibition Road, London SW7 2AZ, UK
Author to whom correspondence should be addressed.
Academic Editors: Marius Pustan and Florina Maria Șerdean
Micromachines 2021, 12(10), 1191;
Received: 6 September 2021 / Revised: 21 September 2021 / Accepted: 25 September 2021 / Published: 30 September 2021
(This article belongs to the Special Issue Advances in MEMS Theory and Applications)
Micro-electromechanical systems (MEMS) bandpass filters based on arrays of electrostatically driven coupled beams have been demonstrated at MHz frequencies. High performance follows from the high Q-factor of mechanical resonators, and electrostatic transduction allows tuning, matching and actuation. For high-order filters, there is a conflict between the transduction mechanism and the coupling arrangement needed for dynamic synchronization: it is not possible to achieve synchronization and tuning simultaneously using a single voltage. Here we propose a general solution, based on the addition of mass-loaded beams at the ends of the array. These beams deflect for direct current (DC) voltages, and therefore allow electrostatic tuning, but do not respond to in-band alternating current (AC) voltages and hence do not interfere with synchronization. Spurious modes generated by these beams may be damped, leaving a good approximation to the desired response. The approach is introduced using a lumped element model and verified using stiffness matrix and finite element models for in-plane arrays with parallel plate drives and shown to be tolerant of the exact mass value. The principle may allow compensation of fabrication-induced variations in complex filters. View Full-Text
Keywords: mechanical filter; coupled resonator; MEMS mechanical filter; coupled resonator; MEMS
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MDPI and ACS Style

Syms, R.; Bouchaala, A. Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters. Micromachines 2021, 12, 1191.

AMA Style

Syms R, Bouchaala A. Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters. Micromachines. 2021; 12(10):1191.

Chicago/Turabian Style

Syms, Richard, and Adam Bouchaala. 2021. "Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters" Micromachines 12, no. 10: 1191.

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