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Journal: Micromachines, 2021
Volume: 12
Number: 74

Article: Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester
Authors: by Nianying Wang, Ruofeng Han, Changnan Chen, Jiebin Gu and Xinxin Li
Link: https://www.mdpi.com/2072-666X/12/1/74

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