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Journal: Micromachines, 2021
Volume: 12
Number: 10
Article:
Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation
Authors:
by
Alexander Kukaev, Dmitry Lukyanov, Denis Mikhailenko, Daniil Safronov, Sergey Shevchenko, Vladimir Venediktov and Andrey Vlasov
Link:
https://www.mdpi.com/2072-666X/12/1/10
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