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Open AccessArticle

Correlated Time-0 and Hot-Carrier Stress Induced FinFET Parameter Variabilities: Modeling Approach

1
Institute for Microelectronics, TU Wien, 1040 Vienna, Austria
2
Imec, 3001 Leuven, Belgium
3
Department of Electrical Engineering (ESAT), KU Leuven, 3001 Leuven, Belgium
4
Ioffe Institute, 194021 St. Petersburg, Russia
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(7), 657; https://doi.org/10.3390/mi11070657
Received: 8 June 2020 / Revised: 27 June 2020 / Accepted: 29 June 2020 / Published: 30 June 2020
We identify correlation between the drain currents in pristine n-channel FinFET transistors and changes in time-0 currents induced by hot-carrier stress. To achieve this goal, we employ our statistical simulation model for hot-carrier degradation (HCD), which considers the effect of random dopants (RDs) on HCD. For this analysis we generate a set of 200 device instantiations where each of them has its own unique configuration of RDs. For all “samples” in this ensemble we calculate time-0 currents (i.e. currents in undamaged FinFETs) and then degradation characteristics such as changes in the linear drain current and device lifetimes. The robust correlation analysis allows us to identify correlation between transistor lifetimes and drain currents in unstressed devices, which implies that FinFETs with initially higher currents degrade faster, i.e. have more prominent linear drain current changes and shorter lifetimes. Another important result is that although at stress conditions the distribution of drain currents becomes wider with stress time, in the operating regime drain current variability diminishes. Finally, we show that if random traps are also taken into account, all the obtained trends remain the same.
Keywords: hot-carrier degradation; random dopants; variability; physical modeling; FinFETs; carrier transport; interface traps; random traps hot-carrier degradation; random dopants; variability; physical modeling; FinFETs; carrier transport; interface traps; random traps
MDPI and ACS Style

Makarov, A.; Roussel, P.; Bury, E.; Vandemaele, M.; Spessot, A.; Linten, D.; Kaczer, B.; Tyaginov, S. Correlated Time-0 and Hot-Carrier Stress Induced FinFET Parameter Variabilities: Modeling Approach. Micromachines 2020, 11, 657.

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