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Journal: Micromachines, 2020
Volume: 11
Number: 651
Article:
Optimization of MOEMS Projection Module Performance with Enhanced Piezoresistive Sensitivity
Authors:
by
Huijun Yu, Peng Zhou, Kewei Wang, Yanfei Huang and Wenjiang Shen
Link:
https://www.mdpi.com/2072-666X/11/7/651
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