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Journal: Micromachines, 2020
Volume: 11
Number: 647
647
Article: Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever
Authors: by Romain Pommois, Gaku Furusawa, Takuya Kosuge, Shun Yasunaga, Haruki Hanawa, Hidetoshi Takahashi, Tetsuo Kan and Hisayuki Aoyama
Link: https://www.mdpi.com/2072-666X/11/7/647

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