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Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever

1
École Nationale Supérieure de Mécanique et des Microtechniques, 26 Rue de l’Épitaphe, 25000 Besançon, France
2
Department of Mechanical and Intelligent Systems Engineering, Graduate School of Informatics and Engineering, The University of Electro-Communications, 1-5-1 Chofugaoka, Chofu-city, Tokyo 182-8585, Japan
3
Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
4
Department of Mechanical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kouhoku-ku, Yokohama, Kanagawa 223-8522, Japan
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(7), 647; https://doi.org/10.3390/mi11070647
Received: 5 June 2020 / Revised: 25 June 2020 / Accepted: 29 June 2020 / Published: 30 June 2020
(This article belongs to the Special Issue MEMS Force Sensor)
In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 μL/s to 400 μL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations. View Full-Text
Keywords: microelectromechanical system (MEMS) cantilever-type force sensor; temperature compensation; microflow measurement microelectromechanical system (MEMS) cantilever-type force sensor; temperature compensation; microflow measurement
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Pommois, R.; Furusawa, G.; Kosuge, T.; Yasunaga, S.; Hanawa, H.; Takahashi, H.; Kan, T.; Aoyama, H. Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever. Micromachines 2020, 11, 647.

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