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Open AccessArticle

Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film

1
Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science & Technology (DGIST), Daegu 42988, Korea
2
DGIST-ETH Microrobotics Research Center (DE-MRC), Daegu Gyeongbuk Institute of Science & Technology (DGIST), Daegu 42988, Korea
3
DGIST Robotics Research Center, Daegu Gyeongbuk Institute of Science & Technology (DGIST), Daegu 42988, Korea
4
SoC Platform Research Center, Korea Electronics Technology Institute (KETI), Seongnam-si 13509, Korea
*
Authors to whom correspondence should be addressed.
Micromachines 2020, 11(6), 623; https://doi.org/10.3390/mi11060623
Received: 30 April 2020 / Revised: 19 June 2020 / Accepted: 26 June 2020 / Published: 26 June 2020
(This article belongs to the Special Issue Selected Papers from the ICAE 2019)
This study presents the fabrication and characterization of a piezoelectric micromachined ultrasonic transducer (pMUT; radius: 40 µm) using a patterned aluminum nitride (AlN) thin film as the active piezoelectric material. A 20 × 20 array of pMUTs using a 1 µm thick AlN thin film was designed and fabricated on a 2 × 2 mm2 footprint for a high fill factor. Based on the electrical impedance and phase of the pMUT array, the electromechanical coefficient was ~1.7% at the average resonant frequency of 2.82 MHz in air. Dynamic displacement of the pMUT surface was characterized by scanning laser Doppler vibrometry. The pressure output while immersed in water was 19.79 kPa when calculated based on the peak displacement at the resonant frequency. The proposed AlN pMUT array has potential applications in biomedical sensing for healthcare, medical imaging, and biometrics. View Full-Text
Keywords: aluminum nitride; piezoelectric micromachined ultrasonic transducer (pMUT); two- dimensional (2D) array aluminum nitride; piezoelectric micromachined ultrasonic transducer (pMUT); two- dimensional (2D) array
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MDPI and ACS Style

Shin, E.; Yeo, H.G.; Yeon, A.; Jin, C.; Park, W.; Lee, S.-C.; Choi, H. Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film. Micromachines 2020, 11, 623.

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