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Journal: Micromachines, 2020
Volume: 11
Number: 623
623
Article: Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film
Authors: by Eunjung Shin, Hong Goo Yeo, Ara Yeon, Changzhu Jin, Wonki Park, Sung-Chul Lee and Hongsoo Choi
Link: https://www.mdpi.com/2072-666X/11/6/623

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