Zhao, T.; Deng, Q.; Zhang, C.; Feng, K.; Zhou, Z.; Yuan, J.
Orthogonal Experimental Research on Dielectrophoresis Polishing (DEPP) of Silicon Wafer. Micromachines 2020, 11, 544.
https://doi.org/10.3390/mi11060544
AMA Style
Zhao T, Deng Q, Zhang C, Feng K, Zhou Z, Yuan J.
Orthogonal Experimental Research on Dielectrophoresis Polishing (DEPP) of Silicon Wafer. Micromachines. 2020; 11(6):544.
https://doi.org/10.3390/mi11060544
Chicago/Turabian Style
Zhao, Tianchen, Qianfa Deng, Cheng Zhang, Kaiping Feng, Zhaozhong Zhou, and Julong Yuan.
2020. "Orthogonal Experimental Research on Dielectrophoresis Polishing (DEPP) of Silicon Wafer" Micromachines 11, no. 6: 544.
https://doi.org/10.3390/mi11060544
APA Style
Zhao, T., Deng, Q., Zhang, C., Feng, K., Zhou, Z., & Yuan, J.
(2020). Orthogonal Experimental Research on Dielectrophoresis Polishing (DEPP) of Silicon Wafer. Micromachines, 11(6), 544.
https://doi.org/10.3390/mi11060544