AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor
1
School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China
2
School of Mathematics and Physics, University of Science and Technology Beijing, Beijing 100083, China
3
Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
4
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(5), 511; https://doi.org/10.3390/mi11050511
Received: 11 April 2020
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Revised: 8 May 2020
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Accepted: 13 May 2020
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Published: 19 May 2020
(This article belongs to the Special Issue Power Electronics and Sensors)
Electric field microsensors have the advantages of a small size, a low power consumption, of avoiding wear, and of measuring both direct-current (DC) and alternating-current (AC) fields, which are especially suited to applications in power systems. However, previous reports were chiefly concerned with proposing new structures or improving the resolution, and there are no systematic studies on the signal characteristics of the microsensor output and the demodulation methods under different electric fields. In this paper, the use of an improved resonant microsensor with coplanar electrodes, and the signal characteristics under a DC field, power frequency field, and AC/DC hybrid fields were thoroughly analyzed respectively, and matching demodulation methods derived from synchronous detection were proposed. We theoretically obtained that the frequencies of the detectable electric fields should be less than half of the resonant frequency of the microsensor, and that the sensitivities of the microsensor were identical for AC/DC hybrid fields with different frequencies. Experiments were conducted to verify the proposed demodulation methods. Within electric field ranges of 0–667 kV/m, the uncertainties were 2.4% and 1.5% for the most common DC and 50 Hz power frequency fields, respectively. The frequency characteristic test results of the microsensor were in agreement with those of the theoretical analysis in the range of 0–1 kHz.
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Keywords:
electric field sensor; resonance; micro-electro-mechanical systems (MEMS); AC/DC electric fields; demodulation methods; frequency bandwidth; power systems
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MDPI and ACS Style
Yang, P.; Wen, X.; Chu, Z.; Ni, X.; Peng, C. AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor. Micromachines 2020, 11, 511. https://doi.org/10.3390/mi11050511
AMA Style
Yang P, Wen X, Chu Z, Ni X, Peng C. AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor. Micromachines. 2020; 11(5):511. https://doi.org/10.3390/mi11050511
Chicago/Turabian StyleYang, Pengfei, Xiaolong Wen, Zhaozhi Chu, Xiaoming Ni, and Chunrong Peng. 2020. "AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor" Micromachines 11, no. 5: 511. https://doi.org/10.3390/mi11050511
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