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Open AccessArticle

Rapid Fabrication of Continuous Surface Fresnel Microlens Array by Femtosecond Laser Focal Field Engineering

by Linyu Yan 1,2, Dong Yang 1,2, Qihuang Gong 1,2,3 and Yan Li 1,2,3,*
1
State Key Laboratory for Mesoscopic Physics, Collaborative Innovation Center of Quantum Matter, Department of Physics, Peking University, Beijing 100871, China
2
Frontiers Science Center for Nano-optoelectronics, Peking University, Beijing 100871, China
3
Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(2), 112; https://doi.org/10.3390/mi11020112
Received: 1 December 2019 / Revised: 5 January 2020 / Accepted: 16 January 2020 / Published: 21 January 2020
(This article belongs to the Special Issue Femtosecond Laser Micromachining for Photonics Applications)
Femtosecond laser direct writing through two-photon polymerization has been widely used in precision fabrication of three-dimensional microstructures but is usually time consuming. In this article, we report the rapid fabrication of continuous surface Fresnel lens array through femtosecond laser three-dimensional focal field engineering. Each Fresnel lens is formed by continuous two-photon polymerization of the two-dimensional slices of the whole structure with one-dimensional scan of the corresponding two-dimensional engineered intensity distribution. Moreover, we anneal the lens array to improve its focusing and imaging performance. View Full-Text
Keywords: femtosecond laser direct writing; two-photon polymerization; three-dimensional focal field engineering; Fresnel lens femtosecond laser direct writing; two-photon polymerization; three-dimensional focal field engineering; Fresnel lens
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MDPI and ACS Style

Yan, L.; Yang, D.; Gong, Q.; Li, Y. Rapid Fabrication of Continuous Surface Fresnel Microlens Array by Femtosecond Laser Focal Field Engineering. Micromachines 2020, 11, 112.

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