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Open AccessArticle

Design and Fabrication of Dual-Scale Broadband Antireflective Structures on Metal Surfaces by Using Nanosecond and Femtosecond Lasers

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State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics of CAS, Xi’an 710119, China
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University of Chinese Academy of Sciences, Beijing 100049, China
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School of Future Technology, University of Chinese Academy of Sciences, Beijing 100049, China
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Electronic Information College, Center of Optical Imagery Analysis and Learning (OPTIMAL), Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
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Zhejiang Wanli University, Ningbo 315100, China
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(1), 20; https://doi.org/10.3390/mi11010020
Received: 30 October 2019 / Revised: 13 December 2019 / Accepted: 20 December 2019 / Published: 24 December 2019
(This article belongs to the Section D:Materials and Processing)
Antireflective surfaces, with their great potential applications, have attracted tremendous attention and have been the subject of extensive research in recent years. However, due to the significant optical impedance mismatch between a metal surface and free space, it is still a challenging issue to realize ultralow reflectance on a metal surface. To address this issue, we propose a two-step strategy for constructing antireflective structures on a Ti-6Al-4V (TC4) surface using nanosecond and femtosecond pulsed lasers in combination. By controlling the parameters of the nanosecond laser, microgrooves are first scratched on the TC4 surface to reduce the interface reflection. Then, the femtosecond laser is focused onto the sample surface with orthogonal scanning to induce deep air holes and nanoscale structures, which effectively enhances the broadband absorption. The antireflection mechanism of the dual-scale structures is discussed regarding morphological characterization and hemispherical reflectance measurements. Finally, the modified sample surface covered with micro-nano hybrid structures is characterized by an average reflectance of 3.1% over the wavelengths ranging from 250 nm to 2250 nm. View Full-Text
Keywords: antireflective surfaces; nanosecond laser; femtosecond laser; micro-nano hybrid structures; broadband spectrum antireflective surfaces; nanosecond laser; femtosecond laser; micro-nano hybrid structures; broadband spectrum
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Lou, R.; Zhang, G.; Li, G.; Li, X.; Liu, Q.; Cheng, G. Design and Fabrication of Dual-Scale Broadband Antireflective Structures on Metal Surfaces by Using Nanosecond and Femtosecond Lasers. Micromachines 2020, 11, 20.

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