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Journal: Micromachines, 2019
Volume: 10
Number: 469

Article: The Hybrid Fabrication Process of Metal/Silicon Composite Structure for MEMS S&A Device
Authors: by Tengjiang Hu, Kuang Fang, Zhiming Zhang, Xiaohua Jiang and Yulong Zhao
Link: https://www.mdpi.com/2072-666X/10/7/469

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