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Journal: Micromachines, 2019
Volume: 10
Number: 469
Article:
The Hybrid Fabrication Process of Metal/Silicon Composite Structure for MEMS S&A Device
Authors:
by
Tengjiang Hu, Kuang Fang, Zhiming Zhang, Xiaohua Jiang and Yulong Zhao
Link:
https://www.mdpi.com/2072-666X/10/7/469
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