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Open AccessEditorial

Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices

Electronic Systems Group (GSE), University of the Balearic Islands, E-07122 Palma (Illes Balears), Spain
Author to whom correspondence should be addressed.
Micromachines 2019, 10(4), 273;
Received: 9 April 2019 / Accepted: 16 April 2019 / Published: 24 April 2019
(This article belongs to the Special Issue Development of CMOS-MEMS/NEMS Devices)
PDF [158 KB, uploaded 24 April 2019]
Note: In lieu of an abstract, this is an excerpt from the first page.


Micro and nanoelectromechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within integrated circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors [...] View Full-Text
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Verd, J.; Segura, J. Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices. Micromachines 2019, 10, 273.

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