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Open AccessEditorial

Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices

Electronic Systems Group (GSE), University of the Balearic Islands, E-07122 Palma (Illes Balears), Spain
Author to whom correspondence should be addressed.
Micromachines 2019, 10(4), 273;
Received: 9 April 2019 / Accepted: 16 April 2019 / Published: 24 April 2019
(This article belongs to the Special Issue Development of CMOS-MEMS/NEMS Devices)
Note: In lieu of an abstract, this is an excerpt from the first page.

Micro and nanoelectromechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within integrated circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors [...] View Full-Text
MDPI and ACS Style

Verd, J.; Segura, J. Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices. Micromachines 2019, 10, 273.

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