An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control
AbstractThis paper proposes an interface application-specific-integrated-circuit (ASIC) for micro-electromechanical systems (MEMS) vibratory gyroscopes. A closed self-excited drive loop is employed for automatic amplitude stabilization based on peak detection and proportion-integration (PI) controller. A nonlinear multiplier terminating the drive loop is designed for rapid resonance oscillation and linearity improvement. Capacitance variation induced by mechanical motion is detected by a differential charge amplifier in sense mode. After phase demodulation and low-pass filtering an analog signal indicating the input angular velocity is obtained. Non-idealities are further suppressed by on-chip temperature drift calibration. In order for better compatibility with digital circuitry systems, a low passband incremental zoom sigma-delta (ΣΔ) analog-to-digital converter (ADC) is implemented for digital output. Manufactured in a standard 0.35 μm complementary metal-oxide-semiconductor (CMOS) technology, the whole interface occupies an active area of 3.2 mm2. Experimental results show a bias instability of 2.2 °/h and a nonlinearity of 0.016% over the full-scale range. View Full-Text
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Lv, R.; Fu, Q.; Yin, L.; Gao, Y.; Bai, W.; Zhang, W.; Zhang, Y.; Chen, W.; Liu, X. An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control. Micromachines 2019, 10, 270.
Lv R, Fu Q, Yin L, Gao Y, Bai W, Zhang W, Zhang Y, Chen W, Liu X. An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control. Micromachines. 2019; 10(4):270.Chicago/Turabian Style
Lv, Risheng; Fu, Qiang; Yin, Liang; Gao, Yuan; Bai, Wei; Zhang, Wenbo; Zhang, Yufeng; Chen, Weiping; Liu, Xiaowei. 2019. "An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control." Micromachines 10, no. 4: 270.
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