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An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control

1
MEMS Center, Harbin Institute of Technology, Harbin 150001, China
2
Key Laboratory of Micro-Systems and Micro-Structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China
3
State Key Laboratory of Urban Water Resource & Environment, Harbin Institute of Technology, Harbin 150001, China
*
Authors to whom correspondence should be addressed.
Micromachines 2019, 10(4), 270; https://doi.org/10.3390/mi10040270
Received: 23 March 2019 / Revised: 11 April 2019 / Accepted: 11 April 2019 / Published: 22 April 2019
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Abstract

This paper proposes an interface application-specific-integrated-circuit (ASIC) for micro-electromechanical systems (MEMS) vibratory gyroscopes. A closed self-excited drive loop is employed for automatic amplitude stabilization based on peak detection and proportion-integration (PI) controller. A nonlinear multiplier terminating the drive loop is designed for rapid resonance oscillation and linearity improvement. Capacitance variation induced by mechanical motion is detected by a differential charge amplifier in sense mode. After phase demodulation and low-pass filtering an analog signal indicating the input angular velocity is obtained. Non-idealities are further suppressed by on-chip temperature drift calibration. In order for better compatibility with digital circuitry systems, a low passband incremental zoom sigma-delta (ΣΔ) analog-to-digital converter (ADC) is implemented for digital output. Manufactured in a standard 0.35 μm complementary metal-oxide-semiconductor (CMOS) technology, the whole interface occupies an active area of 3.2 mm2. Experimental results show a bias instability of 2.2 °/h and a nonlinearity of 0.016% over the full-scale range. View Full-Text
Keywords: micro-electromechanical systems (MEMS) vibratory gyroscope; nonlinear multiplier; automatic gain control; incremental zoom analog-to-digital converter (ADC) micro-electromechanical systems (MEMS) vibratory gyroscope; nonlinear multiplier; automatic gain control; incremental zoom analog-to-digital converter (ADC)
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Lv, R.; Fu, Q.; Yin, L.; Gao, Y.; Bai, W.; Zhang, W.; Zhang, Y.; Chen, W.; Liu, X. An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control. Micromachines 2019, 10, 270.

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