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Open AccessArticle

A Silicon Nanowire Array Biosensor Fabricated by Complementary Metal Oxide Semiconductor Technique for Highly Sensitive and Selective Detection of Serum Carcinoembryonic Antigen

by Xun Yang 1,*, Yun Fan 1, Zhenhua Wu 2,* and Chaoran Liu 3
1
School of Electronic and Information Engineering, Foshan University, Foshan 528000, China
2
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
3
College of Electronics and Information, Hangzhou Dianzi University, Hangzhou 310018, China
*
Authors to whom correspondence should be addressed.
Micromachines 2019, 10(11), 764; https://doi.org/10.3390/mi10110764
Received: 3 October 2019 / Revised: 31 October 2019 / Accepted: 6 November 2019 / Published: 11 November 2019
In this paper, we present a highly sensitive and selective detection of serum carcinoembryonic antigen (CEA) based on silicon nanowire (SiNW) array device. With the help of traditional microfabrication technology, low-cost and highly controllable SiNW array devices were fabricated. After a series of surface modification processes, SiNW array biosensors show rapid and reliable response to CEA; the detection limit of serum CEA was 10 fg/mL, the current signal is linear with the logarithm of serum CEA concentration in the range of 10 fg/mL to 100 pg/mL. In this work, SiNW array biosensors can obtain strong signal and high signal-to-noise ratio; these advantages can reduce the production cost of the SiNW-based system and promote the application of SiNWs in the field of tumor marker detection. View Full-Text
Keywords: carcinoembryonic antigen; silicon nanowire array; highly sensitive; highly selective; low cost carcinoembryonic antigen; silicon nanowire array; highly sensitive; highly selective; low cost
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Yang, X.; Fan, Y.; Wu, Z.; Liu, C. A Silicon Nanowire Array Biosensor Fabricated by Complementary Metal Oxide Semiconductor Technique for Highly Sensitive and Selective Detection of Serum Carcinoembryonic Antigen. Micromachines 2019, 10, 764.

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