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Multiple Laser Stripe Scanning Profilometry Based on Microelectromechanical Systems Scanning Mirror Projection

1
State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
2
School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
3
School of Food Equipment Engineering and Science, Xi’an Jiaotong University, Xi’an 710049, China
4
Key Laboratory of Road Construction Technology and Equipment of MOE, Chang’an University, Xi’an 710064, China
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(1), 57; https://doi.org/10.3390/mi10010057
Received: 10 December 2018 / Revised: 1 January 2019 / Accepted: 10 January 2019 / Published: 16 January 2019
(This article belongs to the Special Issue Optical MEMS)
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Abstract

In traditional laser-based 3D measurement technology, the width of the laser stripe is uncontrollable and uneven. In addition, speckle noise in the image and the noise caused by mechanical movement may reduce the accuracy of the scanning results. This work proposes a new multiple laser stripe scanning profilometry (MLSSP) based on microelectromechanical systems (MEMS) scanning mirror which can project high quality movable laser stripe. It can implement full-field scanning in a short time and does not need to move the measured object or camera. Compared with the traditional laser stripe, the brightness, width and position of the new multiple laser stripes projected by MEMS scanning mirror can be controlled by programming. In addition, the new laser strip can generate high-quality images and the noise caused by mechanical movement is completely eliminated. The experimental results show that the speckle noise is less and the light intensity distribution is more even. Furthermore, the number of pictures needed to be captured is significantly reduced to 1 / N ( N is the number of multiple laser stripes projected by MEMS scanning mirror) and the measurement efficiency is increased by N times, improving the efficiency and accuracy of 3D measurement. View Full-Text
Keywords: 3D measurement; laser stripe width; vibration noise; MLSSP; MEMS scanning mirror 3D measurement; laser stripe width; vibration noise; MLSSP; MEMS scanning mirror
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Hu, G.; Zhou, X.; Zhang, G.; Zhang, C.; Li, D.; Wang, G. Multiple Laser Stripe Scanning Profilometry Based on Microelectromechanical Systems Scanning Mirror Projection. Micromachines 2019, 10, 57.

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