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Keywords = stepper micromotor

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14 pages, 3063 KB  
Article
Static Torque Analysis of Micro Claw-Pole Stepper Motor Based on Field-Circuit Combination
by Yuanxu Xin, Yan Sun, Xudong Wang, Xiaofei Xi, Yabin Su and Yong Yang
Micromachines 2022, 13(9), 1517; https://doi.org/10.3390/mi13091517 - 13 Sep 2022
Cited by 4 | Viewed by 2888
Abstract
Because of the complexity of the structure and magnetic circuit of the micro claw-pole stepper motor, it is difficult to analyze this kind of motor quickly and accurately. Therefore, it takes a lot of time to accurately model and use the three-dimensional finite [...] Read more.
Because of the complexity of the structure and magnetic circuit of the micro claw-pole stepper motor, it is difficult to analyze this kind of motor quickly and accurately. Therefore, it takes a lot of time to accurately model and use the three-dimensional finite element analysis method to accurately analyze the motor. Regarding the three-dimensional finite element method, the equivalent magnetic circuit method analysis is fast, but the accuracy is not high. In order to better study the performance of this kind of micro claw-pole motor and reduce the cost of optimization time, this paper adopts the method of combining the equivalent magnetic circuit method and three-dimensional finite element analysis to analyze the static torque characteristics of the micro permanent magnet claw-pole stepper motor. Firstly, the equivalent magnetic circuit method is used for theoretical analysis, the air-gap flux equation is deduced, and the relationship between the electromagnetic torque and the geometric parameters of the motor is deduced. Then, the three-dimensional finite element simulation results are substituted into the relevant formulas defined by the equivalent magnetic circuit method to obtain a more accurate electromagnetic torque. Finally, through the comparison and analysis of the experimental data, simulation data, and theoretical calculation values, the error rate of the derived motor torque is within 8.5%. The micromotor studied in this paper is optimized, and the holding torque is increased by 12.5% under the premise that the braking torque does not change much. The simulation calculation time is effectively shortened, the analysis difficulty is reduced, and the calculation accuracy is high. It is shown that the method combining the equivalent magnetic circuit method and the three-dimensional finite element analysis method is suitable for preliminary design research and optimization calculation of the micro claw-pole stepper motor. Full article
(This article belongs to the Section E:Engineering and Technology)
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20 pages, 668 KB  
Article
High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology
by Edin Sarajlic, Christophe Yamahata, Erwin Berenschot, Niels Tas, Hiroyuki Fujita and Gijs Krijnen
Micromachines 2010, 1(2), 48-67; https://doi.org/10.3390/mi1020048 - 16 Jul 2010
Cited by 14 | Viewed by 7743
Abstract
Shuffle motors are electrostatic stepper micromotors that employ a built-in mechanical leverage to produce large output forces as well as high resolution displacements. These motors can generally move only over predefined paths that served as driving electrodes. Here, we present the design, modeling [...] Read more.
Shuffle motors are electrostatic stepper micromotors that employ a built-in mechanical leverage to produce large output forces as well as high resolution displacements. These motors can generally move only over predefined paths that served as driving electrodes. Here, we present the design, modeling and experimental characterization of a novel shuffle motor that moves over an unpatterned, electrically grounded surface. By combining the novel design with an innovative micromachining method based on vertical trench isolation, we have greatly simplified the fabrication of the shuffle motors and significantly improved their overall performance characteristics and reliability. Depending on the propulsion voltage, our motor with external dimensions of 290 μm × 410 mm displays two distinct operational modes with adjustable step sizes varying respectively from 0.6 to 7 nm and from 49 to 62 nm. The prototype was driven up to a cycling frequency of 80 kHz, showing nearly linear dependence of its velocity with frequency and a maximum velocity of 3.6 mm/s. For driving voltages of 55 V, the device had a maximum travel range of ±70 μm and exhibited an output force of 1.7 mN, resulting in the highest force and power densities reported so far for an electrostatic micromotor. After five days of operation, it had traveled a cumulative distance of more than 1.5 km in 34 billion steps without noticeable deterioration in performance. Full article
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