The Effects of Zr Doping on the Optical, Electrical and Microstructural Properties of Thin ZnO Films Deposited by Atomic Layer Deposition
Abstract
:1. Introduction
2. Experimental Section
3. Results and Discussion
3.1. Effect of Doping and Film Thickness on the Microstructure and Electrical Properties.
3.2. Effect of Doping on the Optical Properties.
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Herodotou, S.; Treharne, R.E.; Durose, K.; Tatlock, G.J.; Potter, R.J. The Effects of Zr Doping on the Optical, Electrical and Microstructural Properties of Thin ZnO Films Deposited by Atomic Layer Deposition. Materials 2015, 8, 7230-7240. https://doi.org/10.3390/ma8105369
Herodotou S, Treharne RE, Durose K, Tatlock GJ, Potter RJ. The Effects of Zr Doping on the Optical, Electrical and Microstructural Properties of Thin ZnO Films Deposited by Atomic Layer Deposition. Materials. 2015; 8(10):7230-7240. https://doi.org/10.3390/ma8105369
Chicago/Turabian StyleHerodotou, Stephania, Robert E. Treharne, Ken Durose, Gordon J. Tatlock, and Richard J. Potter. 2015. "The Effects of Zr Doping on the Optical, Electrical and Microstructural Properties of Thin ZnO Films Deposited by Atomic Layer Deposition" Materials 8, no. 10: 7230-7240. https://doi.org/10.3390/ma8105369