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Journal: Materials, 2015
Volume: 8
Number: 5364
7084-7093
Article: Single-Crystal Y₂O₃ Epitaxially on GaAs(001) and (111) Using Atomic Layer Deposition
Authors: by Y. H. Lin, C. K. Cheng, K. H. Chen, C. H. Fu, T. W. Chang, C. H. Hsu, J. Kwo and M. Hong
Link: https://www.mdpi.com/1996-1944/8/10/5364

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