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Journal: Materials, 2012
Volume: 5
Number: 377

Article: A Study of Trimethylsilane (3MS) and Tetramethylsilane (4MS) Based α-SiCN:H/α-SiCO:H Diffusion Barrier Films
Authors: by , , , , and
Link: https://www.mdpi.com/1996-1944/5/3/377

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