Article Versions Notes

Jiang W, Zhu L, Chen L, Yang Y, Yu X, Li X, Mu Z, Yu W. In Situ Synchrotron XRD Characterization of Piezoelectric Al_1−xSc_xN Thin Films for MEMS Applications. Materials. 2023; 16(5):1781. https://doi.org/10.3390/ma16051781

Jiang, Wenzheng, Lei Zhu, Lingli Chen, Yumeng Yang, Xi Yu, Xiaolong Li, Zhiqiang Mu, and Wenjie Yu. 2023. "In Situ Synchrotron XRD Characterization of Piezoelectric Al_1−xSc_xN Thin Films for MEMS Applications" Materials 16, no. 5: 1781. https://doi.org/10.3390/ma16051781

Jiang, W., Zhu, L., Chen, L., Yang, Y., Yu, X., Li, X., Mu, Z., & Yu, W. (2023). In Situ Synchrotron XRD Characterization of Piezoelectric Al_1−xSc_xN Thin Films for MEMS Applications. Materials, 16(5), 1781. https://doi.org/10.3390/ma16051781