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Journal: Materials, 2022
Volume: 15
Number: 2945
2945
Article: The Structural Evolution of Semipolar (11−22) Plane AlN Tem-Plate on m-Plane Sapphire Prepared by Sputtering and High Temperature Annealing
Authors: by Fabi Zhang, Jin Zhang, Lijie Huang, Shangfeng Liu, Wei Luo, Junjie Kang, Zhiwen Liang, Jiakang Cao, Chenhui Zhang, Qi Wang and Ye Yuan
Link: https://www.mdpi.com/1996-1944/15/8/2945

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