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Journal: Materials, 2022
Volume: 15
Number: 1843
Article:
Oxygen and Nitrogen Transfer in Furnaces in Crystal Growth of Silicon by Czochralski and Directional Solidification Processes
Authors:
by
Koichi Kakimoto, Xin Liu and Satoshi Nakano
Link:
https://www.mdpi.com/1996-1944/15/5/1843
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