Temperature Sensor Based on Surface Plasmon Resonance with TiO₂-Au-TiO₂ Triple Structure

Temperature sensors have been widely applied in daily life and production, but little attention has been paid to the research on temperature sensors based on surface plasmon resonance (SPR) sensors. Therefore, an SPR temperature sensor with a triple structure of titanium dioxide (TiO₂) film, gold (Au) film, and TiO₂ nanorods is proposed in this article. By optimizing the thickness and structure of TiO₂ film and nanorods and Au film, it is found that the sensitivity of the SPR temperature sensor can achieve 6038.53 nm/RIU and the detection temperature sensitivity is −2.40 nm/°C. According to the results, the sensitivity of the optimized sensor is 77.81% higher than that of the sensor with pure Au film, which is attributed to the TiO₂(film)-Au-TiO₂(nanorods) structure. Moreover, there is a good linear correlation (greater than 0.99) between temperature and resonance wavelength in the range from 0 °C to 60 °C, which can ensure the detection resolution. The high sensitivity, FOM, and detection resolution indicate that the proposed SPR sensor has a promising application in temperature monitoring.