Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process
Abstract
1. Introduction
2. Experimental
2.1. Deposition
2.2. Film Evaluation
2.2.1. Structural Properties
2.2.2. Mechanical Properties
3. Results and Discussion
3.1. Structural Properties
3.1.1. TEM and GDOES Studies: Systematizing Based on the B–C–N Ternary Diagram
3.1.2. FTIR Studies
3.1.3. Raman Spectroscopy
3.2. Mechanical Properties
3.2.1. Indentation Hardness
3.2.2. Frictional Properties
4. Conclusions
- The boron/nitrogen ratios of the films were 4:1, 2:1, and 1:1. The hardness and the friction coefficient of the a-BCN thin film deteriorated as the carbon content decreased, regardless of the boron/nitrogen ratio.
- According to Raman spectroscopy studies, the changes in the mechanical properties are attributed to the deterioration of the film structure when the carbon content is < approximately 90 at%. This was confirmed by the increase in the G peak position and the I(D)/I(G) ratio and the decrease in the FWHM(G) at carbon contents <90 at%.
- By adding a small amount of boron and nitrogen, while ensuring that the carbon content does not fall below 90%, it is possible to prepare a-BCN film with a hardness almost identical to that of the a-C film and a wear resistance superior to that of the a-C film.
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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a-C | a-BCN | ||
---|---|---|---|
Pressure | 0.4 Pa | ||
Ar; N2 flow | 10 cm3/min; 0 cm3/min | 10 cm3/min; 0 cm3/min 10 cm3/min; 4.3 cm3/min 10 cm3/min; 10 cm3/min 0 cm3/min; 10 cm3/min | |
Arc gun | Target | Graphite | Graphite Boron (0.5%) doped Graphite Boron (1.0%) doped Graphite Boron (5.0%) doped Graphite Boron (20%) doped Graphite |
Capacitance | 360 µF | ||
Arc voltage | −100, −400 V | ||
Magnetron sputtering | Target | ― | hBN |
RF power | ― | 100, 200, 300 W | |
Substrate potential | floating, DC −100 V | ||
Deposition time | 60, 180 min |
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Hirata, Y.; Takeuchi, R.; Taniguchi, H.; Kawagoe, M.; Iwamoto, Y.; Yoshizato, M.; Akasaka, H.; Ohtake, N. Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process. Materials 2021, 14, 719. https://doi.org/10.3390/ma14040719
Hirata Y, Takeuchi R, Taniguchi H, Kawagoe M, Iwamoto Y, Yoshizato M, Akasaka H, Ohtake N. Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process. Materials. 2021; 14(4):719. https://doi.org/10.3390/ma14040719
Chicago/Turabian StyleHirata, Yuki, Ryotaro Takeuchi, Hiroyuki Taniguchi, Masao Kawagoe, Yoshinao Iwamoto, Mikito Yoshizato, Hiroki Akasaka, and Naoto Ohtake. 2021. "Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process" Materials 14, no. 4: 719. https://doi.org/10.3390/ma14040719
APA StyleHirata, Y., Takeuchi, R., Taniguchi, H., Kawagoe, M., Iwamoto, Y., Yoshizato, M., Akasaka, H., & Ohtake, N. (2021). Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process. Materials, 14(4), 719. https://doi.org/10.3390/ma14040719