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Journal: Materials, 2020
Volume: 13
Number: 2039

Article: Phase Formation and High-Temperature Stability of Very Thin Co-Sputtered Ti-Al and Multilayered Ti/Al Films on Thermally Oxidized Si Substrates
Authors: by Marietta Seifert, Eric Lattner, Siegfried B. Menzel, Steffen Oswald and Thomas Gemming
Link: https://www.mdpi.com/1996-1944/13/9/2039

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