Deposition of Thin Alumina Films Containing 3D Ordered Network of Nanopores on Porous Substrates
by
Marija Tkalčević 1
, Marijan Gotić 1, Lovro Basioli 1, Martina Lihter 2, Goran Dražić 3, Sigrid Bernstorff 4, Tomislav Vuletić 5 and Maja Mičetić 1,*
Marija Tkalčević 1, Marijan Gotić 1, Lovro Basioli 1, Martina Lihter 2, Goran Dražić 3, Sigrid Bernstorff 4, Tomislav Vuletić 5 and Maja Mičetić 1,*
1
Ruđer Bošković Institute, Division of Materials Physics, Bijenička cesta 54, 10000 Zagreb, Croatia
2
Laboratory of Nanoscale Biology, Institute of Bioengineering, School of Engineering, EPFL, 1015 Lausanne, Switzerland
3
National Institute of Chemistry, Hajdrihova 19, 1001 Ljubljana, Slovenia
4
Elettra-Sincrotrone Trieste, 34149 Basovizza, Italy
5
Institute of Physics, Bijenička Cesta 46, 10000 Zagreb, Croatia
*
Author to whom correspondence should be addressed.
Materials 2020, 13(13), 2883; https://doi.org/10.3390/ma13132883
Received: 18 May 2020 / Revised: 11 June 2020 / Accepted: 22 June 2020 / Published: 27 June 2020
(This article belongs to the Special Issue Deposition and Characterization of Thin Metallic- and Semiconductor-Based Films)
Self-supporting thin films containing nanopores are very promising materials for use for multiple applications, especially in nanofiltration. Here, we present a method for the production of nanomembranes containing a 3D ordered network of nanopores in an alumina matrix, with a diameter of about 1 nm and a body centered tetragonal structure of the network nodes. The material is produced by the magnetron sputtering deposition of a 3D ordered network of Ge nanowires in an alumina matrix, followed by a specific annealing process resulting in the evaporation of Ge. We demonstrate that the films can be easily grown on commercially available alumina substrates containing larger pores with diameters between 20 and 400 nm. We have determined the minimal film thickness needed to entirely cover the larger pores. We believe that these films have the potential for applications in the fields of filtration, separation and sensing.
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Keywords:
nanoporous; microporous; alumina; 3D network of nanopores; membrane
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MDPI and ACS Style
Tkalčević, M.; Gotić, M.; Basioli, L.; Lihter, M.; Dražić, G.; Bernstorff, S.; Vuletić, T.; Mičetić, M. Deposition of Thin Alumina Films Containing 3D Ordered Network of Nanopores on Porous Substrates. Materials 2020, 13, 2883.
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