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Journal: Materials, 2019
Volume: 12
Number: 1077
Article:
Research on the Surface Evolution of Single Crystal Silicon Mirror Contaminated by Metallic Elements during Elastic Jet Polishing Techniques
Authors:
by
Wanli Zhang, Feng Shi, Yifan Dai, Yaoyu Zhong, Ci Song and Ye Tian
Link:
https://www.mdpi.com/1996-1944/12/7/1077
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