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Journal: Materials, 2019
Volume: 12
Number: 2658
Article:
Effect of Bias Voltage on Mechanical Properties of HiPIMS/RFMS Cosputtered Zr–Si–N Films
Authors:
by
Yung-I Chen, Yu-Zhe Zheng, Li-Chun Chang and Yu-Heng Liu
Link:
https://www.mdpi.com/1996-1944/12/17/2658
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