Next Article in Journal
Magnetoresistance and Thermal Transformation Arrest in Pd2Mn1.4Sn0.6 Heusler Alloys
Next Article in Special Issue
In Situ Macroscopic Tensile Testing in SEM and Electron Channeling Contrast Imaging: Pencil Glide Evidenced in a Bulk β-Ti21S Polycrystal
Previous Article in Journal
Molecular Dynamics Simulations of Atomic Diffusion during the Al–Cu Ultrasonic Welding Process
Previous Article in Special Issue
Modeling Dislocation Contrasts Obtained by Accurate-Electron Channeling Contrast Imaging for Characterizing Deformation Mechanisms in Bulk Materials
Open AccessArticle

In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

Institute of Scientific Instruments of the CAS, v. v. i., Královopolská 147, 612 64 Brno, Czech Republic
Author to whom correspondence should be addressed.
Materials 2019, 12(14), 2307;
Received: 20 June 2019 / Revised: 11 July 2019 / Accepted: 17 July 2019 / Published: 19 July 2019
Scanning electron microscopes come equipped with different types of detectors for the collection of signal electrons emitted from samples. In-lens detection systems mostly consist of several auxiliary electrodes that help electrons to travel in a direction towards the detector. This paper aims to show that a through-the-lens detector in a commercial electron microscope Magellan 400 FEG can, under specific conditions, work as an energy band-pass filter of secondary electrons that are excited by the primary beam electrons. The band-pass filter properties verify extensive simulations of secondary and backscattered electrons in a precision 3D model of a microscope. A unique test sample demonstrates the effects of the band-pass filter on final image and contrast with chromium and silver stripes on a silicon substrate, manufactured by a combination of e-beam lithography, wet etching, and lift-off technique. The ray tracing of signal electrons in a detector model predicate that the through-the-lens detector works as a band-pass filter of the secondary electrons with an energy window of about 3 eV. By moving the energy window along the secondary electron energy spectrum curve of the analyzed material, we select the energy of the secondary electrons to be detected. Energy filtration brings a change in contrast in the image as well as displaying details that are not otherwise visible. View Full-Text
Keywords: band-pass filter of signal electrons; SE detection; trajectory simulations band-pass filter of signal electrons; SE detection; trajectory simulations
Show Figures

Figure 1

MDPI and ACS Style

Konvalina, I.; Mika, F.; Krátký, S.; Materna Mikmeková, E.; Müllerová, I. In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM. Materials 2019, 12, 2307.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

Search more from Scilit
Back to TopTop