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Open AccessArticle

In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

Institute of Scientific Instruments of the CAS, v. v. i., Královopolská 147, 612 64 Brno, Czech Republic
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Materials 2019, 12(14), 2307; https://doi.org/10.3390/ma12142307
Received: 20 June 2019 / Revised: 11 July 2019 / Accepted: 17 July 2019 / Published: 19 July 2019
Scanning electron microscopes come equipped with different types of detectors for the collection of signal electrons emitted from samples. In-lens detection systems mostly consist of several auxiliary electrodes that help electrons to travel in a direction towards the detector. This paper aims to show that a through-the-lens detector in a commercial electron microscope Magellan 400 FEG can, under specific conditions, work as an energy band-pass filter of secondary electrons that are excited by the primary beam electrons. The band-pass filter properties verify extensive simulations of secondary and backscattered electrons in a precision 3D model of a microscope. A unique test sample demonstrates the effects of the band-pass filter on final image and contrast with chromium and silver stripes on a silicon substrate, manufactured by a combination of e-beam lithography, wet etching, and lift-off technique. The ray tracing of signal electrons in a detector model predicate that the through-the-lens detector works as a band-pass filter of the secondary electrons with an energy window of about 3 eV. By moving the energy window along the secondary electron energy spectrum curve of the analyzed material, we select the energy of the secondary electrons to be detected. Energy filtration brings a change in contrast in the image as well as displaying details that are not otherwise visible. View Full-Text
Keywords: band-pass filter of signal electrons; SE detection; trajectory simulations band-pass filter of signal electrons; SE detection; trajectory simulations
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MDPI and ACS Style

Konvalina, I.; Mika, F.; Krátký, S.; Materna Mikmeková, E.; Müllerová, I. In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM. Materials 2019, 12, 2307.

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