3.1. Effect on Surface Quality
Surface integration mainly includes surface texture (mainly surface roughness), a metallurgical layer, and residual stress (RS) [
8,
27].
Figure 4 shows surface textures micromilled with the coolants mentioned above. Tool traces are imprinted on all the machined surfaces, especially on the areas that approach both sides of the slot base. As tool traces were generated by the adhesion of the work piece surface to the tool rake and flank faces causing the generation of built-up edge (BUE) and build-up lines [
8], using MQCL cannot completely eliminate BUE, which is also a major factor that affects surface integrity. In
Figure 4, the surface consists of a dark and bright area whose boundary is marked as orange. The surface morphology is captured by Laser Scanning Confocal Microscopy (LSCM), so the degree of brightness reflects the height of surface points and can also indirectly reflect surface roughness and surface accuracy. As a tool with a diameter of nearly 150 μm is employed, the stiffness in feed direction of the tool is very low and large deflection appears in the micromilling process [
28], especially when using a large feed rate. Hence, the area that approaches both sides of the slot base is a little higher than other areas. In the case of using Isopar H, the machined surface shows with a minimum of flaws, which mainly form as adhered chips [
29]. The dark area in the case of using ethyl alcohol is much larger than that in the case of using Isopar H, but approaches that in the case of using distilled water, which can be observed in
Figure 4. One of the performances of MQCL is owing to the lubrication effect that changes the tribological properties and contact stress [
30]. As the relationship between the dynamic viscosity of Isopar H (
= 1.8 mm
2/s), ethyl alcohol (
= 1.4 mm
2/s), and distilled water (
= 0.9 mm
2/s) is
Vp >
Ve >
Vd at 25 °C, large dynamic viscosity helps to decrease the friction across the area of the tool–chip interaction [
8] and heat generation. Even though lower friction is good to reduce cutting force, penetration of coolants is more important [
14]. However, much larger dynamic viscosity of coolants limits its penetration [
31], even though the dynamic viscosity will decrease in the cutting zone due to high temperature [
14]. Too higher dynamic viscosity decreases the flow of coolants and makes coolants activate the affinity to the cutting tool without extraction of the heat generated, and even has negative impact on cutting tool [
7].
In general, coolant penetration decreases with increasing tool-chip contact length and higher surface tension [
20]. In this experiment, Isopar H works to improve surface quality, and, thus, its dynamic viscosity is acceptable to penetrate. Compared with a surface machined with dry milling, the amount of minor flaws is much more than that of the previous three cases, especially the case of using Isopar H and ethyl alcohol. It shows that a larger dynamic viscosity of coolants also helps to decrease minor flaws on the surface during the machining process. In the case of dry milling, there are smeared chips, classified as major flaws, on the slot base surface, especially on the side surfaces of the slot base. In terms of the multistep micromilling method employed in the experiments, chips adhering on the tool in the previous step squeeze between the work piece and tool during the next-step milling process. Under these newly formed conditions, the adhering chips and the work piece are interacting due to BUE [
29]. The loss of sharpness even increases the tool edge radius and cutting force during the cutting. Therefore, with the passing of the tool, the surface becomes deformed by rubbing due to the size effect [
32], and surface stresses also occur. Surface integrity is then deteriorated by machining without using MQCL. Without liquid layer forms, a high amount of temperature and friction are generated [
33]. Hence, coolants with scoped higher dynamic viscosity are recommended if better surface integrity is required. Among these coolants in this experiment, Isopar H and ethyl alcohol are the best choice for better surface integrity.
Figure 5a shows statistical surface roughness in the four cases. They are calculated from data captured by LSCM (OLS-3000) after filtering. On the same level, the three cases with coolants show lower surface roughness than that in the dry case. Dry micromilling accelerates tool wear as the cutting length increases. A BUE on tool forms more easily [
23], and considering the material of the tool and work piece, Ni and Fe diffuse into WC, by which tool wear accelerates [
11]. Hence, the machined surface with the best roughness is generated with Isopar H, and the surface roughness in the case of ethyl alcohol approaches that in the case of distilled water.
As can be seen from
Figure 5b, the statistical surface accuracy PV values also show that dry machining generates the worst surface accuracy. There is no cooling and lubrication effect to decrease heat between the interface of the tool rake face and chip, and in the interface of the tool flank face and machining surface, tool wear appears more dramatically. Besides that, the adhesive chip that is formed in previous machining step equivalently enlarges the tool edge radius and further generates the BUE on the surface to deteriorate surface roughness and accuracy. Unlike dry micromilling, surface accuracy generated with coolants is also decreased along with surface roughness. As the machining speed, which mainly affects surface roughness [
34], is used in this experiment, surface roughness is then affected by coolants and MQL yields up to 1.4–10.4% lower value of surface roughness, compared with the dry-machining case. Referring to the lower value of 67% in reference [
12], comparatively high feed per tooth also decreases the cooling and lubrication performance of MQCL. In addition, dry milling increases the hardness of the work piece surface, thus adversely affecting cutting forces, and consequently causing higher surface roughness in magnitude as well as in variations [
35], especially using the multistep milling method. From the statistical PV values, the best surface accuracy appears in the case of using ethyl alcohol.
3.3. The Effect of the Coolants on the Mechanical Properties
The deformed layer and RS are the main factors that affect tensile strength and fatigue strength. Compressive residual stress (CRS) enhances fatigue life and tensile strength [
27], and the RS can be measured by high-energy X-ray diffraction [
31]. However, this measurement method cannot be used in a slot with only 150 μm width due to using a large facula [
36]. The final service performance is decided by the mechanical properties. Thus, mechanical properties can reflect service performance more directly and reflect RS indirectly. As the influence of RS on tensile strength is obvious [
27] and the mechanical properties are the key indexes, the mechanical properties of the machined work piece are analyzed directly. The main mechanical properties [
37], which include Young’s module
E, yield strength
, tensile strength
, and breaking elongation
, are calculated from engineering the stress-engineering strain curve of the test component. An original component is tested for calibrating related calculation parameters. They are set as criteria for subsequent tests and the standard mechanical properties are listed in
Table 6.
3.3.1. The Effect of the Coolants on Young’s Module
Young’s module
E of this component decides the sensitivity and measurement range of the accelerometer. In
Figure 7, Young’s modules under different coolant methods are all smaller than the standard Young’s module. Dry milling always produces the highest microhardness [
38] caused by strong strain hardening and deformed layer that impacts on the elastic module [
39]. This is the combination of a high strain gradient and thermal gradient. Besides, the increase of surface microhardness [
35] in the previous milling step enhances milling force and thermal concentrate in the current milling step while using the multistep milling method. It is a process of repeated influences. In reference [
40], the microhardness (HV) and nanohardness (HN) of Al-Al
2O
3 nanocomposite increase with the increase of ball-milling time, and its Young’s module has positive correlation with its HV and HN. However, in this experiment, there is no obvious relationship between surface hardness and Young’s module. The thickness of the deformed layer is decreased by the multistep method but increased by comparatively high machining speed [
31]. It is always at a microscale [
8] and the whole thickness of the machined component is only near 15 μm, so the differences between Young’s module
E under different cases are not small.
3.3.2. The Effect of the Coolants on Yield Strength
Yield strength
of the component indirectly reflects the service performance of the accelerometer.
Figure 8 shows that
of the all components are smaller than the standard one. The group that possesses the largest yield strength is machined with ethyl alcohol. As the temperature of the machined surface is higher than that of deeper layer in the micromilling process, the machined surface then stands tensile residual stress. When it is effectively decreased by using ethyl alcohol as coolant, the tensile residual stress of the machined surface is decreased as well and the yield strength is thus comparatively increased. However, it is still smaller than the standard yield strength because of the deformed layer. The machined thin-walled work piece with better surface quality possesses larger yield stress.
3.3.3. The Effect of the Coolants on Tensile Strength
Tensile strength
of the machined work piece directly decides the service performance of accelerometer, so it is a very important index.
Figure 9 shows the tensile strength under different coolant methods. The
of all the machined work piece is smaller than that of the original material. The largest tensile strength appears at the work piece micromilled with ethyl alcohol. Tensile strength is mainly affected by two factors: deformed layer and RS. CRS is generated by mechanical load [
31], especially when micromilling with a large negative rake angle [
41]. However, tensile residual stress (TRS) is generated by high temperature [
42]. As TRS is mainly affected by heat in the milling process, the cooling effect of MQCL is the main factor by which TRS is reduced [
43] compared with the dry-milling case. In the dry-milling case, tool wear accelerates and tool edge radius increases, by which rubbing and ploughing [
44] happens more easily. It is an abusive machining condition leading to bad surface integrity [
45]. Compressive stress and heat are generated very fast. This will also cause an increase in the RS under the surface [
46]. Obviously, according to the experimental results, heat generation is more concentrated. This is another factor of MQCL works, which alters heat-transfer characteristics [
30]. Compared with the Isopar H case and the distilled water case, the result shows that RS distribution is significantly affected by different coolants. Because of the better cooling effects of using ethyl alcohol, the TRS on the machined surface decreases the ability of crack initiation, and thus increases the tensile strength even though it is also affected by surface quality [
8]. The tensile strength has positive correlation with the related yield strength, namely
. It also indicates that ethyl alcohol can be used to obtain comparatively lager tensile strength in micromilling thin-walled Elgiloy.
As the material of the work piece has low thermal conductivity, the ability to take away heat of the coolants thus becomes more important. The evaporation process of coolants is an endothermic process and the evaporation rate of coolants has great impact on cooling performance. Considering the relative evaporation rate (n-BuAc = 100) of coolants, that of ethyl alcohol (202) is much larger than that of Isopar H (9) and distilled water (42). After the evaporation of ethyl alcohol droplets, heat is taken away and new ethyl alcohol droplets penetrate into the machining zone more easily.
3.3.4. The Effect of the Coolants on Breaking Elongation
Figure 10 shows the braking elongation
δ of the machined work pieces under the four cases. All the
δ are smaller than the minimum value of the standard breaking elongation, but
δ under the ethyl alcohol case is the biggest one and that under the dry-machining case is the smallest one. Although the thickness of the machined work piece affects the breaking elongation, the machining process has great impact on the breaking elongation, as can be seen from
Figure 10. It indicates that using ethyl alcohol obtains better surface integrity, such as a deformed layer and RS, and has the slightest impact on the breaking elongation. In this experiment, the breaking elongation
δ under the Isopar H case is slightly larger than that under the distilled water case. It also indicates that the penetration and cooling effect of the coolants are more important to improve the machining process.
3.3.5. Analysis on the Performance of the Coolants
In the case of spraying coolants into the interface between the chip and tool rake face (see
Figure 11), the distance between the nozzle and the cutting zone, size, and moving direction of coolant droplets determine the penetration [
18].
v denotes the velocity vector of coolant droplets and
denotes the angle between
v and tool rake face. A smaller
has better penetration when the nozzle approaches tool rake face. However, it is complex in micromilling due to the complex geometry shape and rotational movement of the tool, so more than one nozzle should be adopted in the milling process. In addition, surface tension also affects coolant penetration. The contact angle
always denotes wettability and smaller
means better penetration [
20].
In the lubrication and cooling process, dynamic viscosity denotes the frication coefficient between chip and tool surface. Coolant droplets with polar molecules adsorb the chip and tool surface, and friction in droplets happens when relative movement appears. The friction coefficient is then deduced. In this experiment, Isopar H belongs to chemisorption and the other coolants belong to physical absorption, so the adsorptivity of Isopar H is better. Isopar H possesses better performance on lubrication due to its high adsorptivity and low friction coefficient. In general, cooling effect is the main function to be the auxiliary method used in the macromachining process due to the large amount of heat generation during machining, and the lubrication effect is mainly used in the micromachining process. However, for a micromilling low thermal conductive work piece, especially in a very short reaction time, cooling effect is more important and that is also why a negative effect appears in machining Inconel 718 while using vegetable oil as lubrication [
7]. The effect of convective heat transfer is larger than that of thermal radiation but smaller than the heat of evaporation in this micromilling process. As the saturated vapor pressure of ethyl alcohol is much larger than that of the other coolants, its relative volatility is the largest. The cooling effect of Isopar H is the worst in the experiment, but Isopar H has a good lubrication effect by which heat generation by friction is reduced, in terms of tensile experimental results. The relative volatility of ethyl alcohol is much larger than that of distilled water due to high good extreme pressure (EP) properties, even though the heat of evaporation (J/g) of distilled water is larger than that of ethyl alcohol. The generated heat is taken away by ethyl alcohol faster.