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Materials 2018, 11(8), 1460; https://doi.org/10.3390/ma11081460

Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation

1
School of Interdisciplinary Bioscience and Bioengineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-ro, Nam-gu, 37673 Pohang, Korea
2
Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-ro, Nam-gu, 37673 Pohang, Korea
3
Pohang Accelerator Laboratory (PAL), Pohang University of Science and Technology (POSTECH), 77 Cheongam-ro, Nam-gu, 37673 Pohang, Korea
*
Authors to whom correspondence should be addressed.
Received: 7 July 2018 / Revised: 6 August 2018 / Accepted: 15 August 2018 / Published: 17 August 2018
(This article belongs to the Special Issue Special Issue of the Manufacturing Engineering Society (MES))
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Abstract

In this paper, we developed a method of fabricating polymer microstructures at various angles on a single substrate via synchrotron X-ray lithography coupled with simple dimensional transformations. Earlier efforts to create various three-dimensional (3D) features on flat substrates focused on the exposure technology, material properties, and light sources. A few research groups have sought to create microstructures on curved substrates. We created tilted microstructures of various angles by simply deforming the substrate from 3D to two-dimensional (2D). The microstructural inclination angles changed depending on the angles of the support at particular positions. We used convex, concave, and S-shaped supports to fabricate microstructures with high aspect ratios (1:11) and high inclination angles (to 79°). The method is simple and can be extended to various 3D microstructural applications; for example, the fabrication of microarrays for optical components, and tilted micro/nanochannels for biological applications. View Full-Text
Keywords: Synchrotron X-rays; lithography; curved substrate; microstructures Synchrotron X-rays; lithography; curved substrate; microstructures
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Park, K.; Kim, K.; Lee, S.C.; Lim, G.; Kim, J.H. Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation. Materials 2018, 11, 1460.

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