Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health
Abstract
:1. Introduction
2. Materials and Methods
2.1. Film Deposition
2.2. Film Characterization
3. Results and Discussion
3.1. Chemical Composition
3.2. Surface Morphology
3.3. Surface Roughness
3.4. Crystalline Structure
3.5. Optical Properties
3.6. Photoluminescence
4. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Fang, L.; Jiang, Y.; Zhu, S.; Ding, J.; Zhang, D.; Yin, A.; Chen, P. Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health. Materials 2018, 11, 2196. https://doi.org/10.3390/ma11112196
Fang L, Jiang Y, Zhu S, Ding J, Zhang D, Yin A, Chen P. Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health. Materials. 2018; 11(11):2196. https://doi.org/10.3390/ma11112196
Chicago/Turabian StyleFang, Liping, Yidong Jiang, Shengfa Zhu, Jingjing Ding, Dongxu Zhang, Anyi Yin, and Piheng Chen. 2018. "Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health" Materials 11, no. 11: 2196. https://doi.org/10.3390/ma11112196
APA StyleFang, L., Jiang, Y., Zhu, S., Ding, J., Zhang, D., Yin, A., & Chen, P. (2018). Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health. Materials, 11(11), 2196. https://doi.org/10.3390/ma11112196