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Open AccessArticle

Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors

State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
Author to whom correspondence should be addressed.
Academic Editor: Federico Bella
Materials 2017, 10(1), 69;
Received: 7 November 2016 / Revised: 26 December 2016 / Accepted: 9 January 2017 / Published: 16 January 2017
(This article belongs to the Section Structure Analysis and Characterization)
In order to develop a film electrode for the surface acoustic wave (SAW) devices working in high temperature, harsh environments, novel AlN/Pt/ZnO multilayers were prepared using pulsed laser deposition (PLD) systems on langasite (LGS) substrates. The AlN film was used as a protective layer and the ZnO buffer layer was introduced to improve the crystal quality of Pt films. The results show that the resistances of Pt and AlN/Pt film electrodes violently increase above 600 °C and 800 °C, respectively, while the resistances of AlN/Pt/ZnO electrodes have more stable electrical resistance from room temperature to 1000 °C. The AlN/Pt/ZnO electrode, where the ZnO film was deposited at 600 °C, has the best temperature stability and can steadily work for 4 h at 1000 °C. The mechanism underlying the stable resistance of the AlN/Pt/ZnO electrode at a high temperature was investigated by analyzing the microstructure of the prepared samples. The proposed AlN/Pt/ZnO film electrode has great potential for applications in high temperature SAW sensors. View Full-Text
Keywords: high temperature electrode; SAW sensor; electrical resistance; langasite high temperature electrode; SAW sensor; electrical resistance; langasite
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MDPI and ACS Style

Liu, X.; Peng, B.; Zhang, W.; Zhu, J.; Liu, X.; Wei, M. Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors. Materials 2017, 10, 69.

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