Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors
AbstractIn order to develop a film electrode for the surface acoustic wave (SAW) devices working in high temperature, harsh environments, novel AlN/Pt/ZnO multilayers were prepared using pulsed laser deposition (PLD) systems on langasite (LGS) substrates. The AlN film was used as a protective layer and the ZnO buffer layer was introduced to improve the crystal quality of Pt films. The results show that the resistances of Pt and AlN/Pt film electrodes violently increase above 600 °C and 800 °C, respectively, while the resistances of AlN/Pt/ZnO electrodes have more stable electrical resistance from room temperature to 1000 °C. The AlN/Pt/ZnO electrode, where the ZnO film was deposited at 600 °C, has the best temperature stability and can steadily work for 4 h at 1000 °C. The mechanism underlying the stable resistance of the AlN/Pt/ZnO electrode at a high temperature was investigated by analyzing the microstructure of the prepared samples. The proposed AlN/Pt/ZnO film electrode has great potential for applications in high temperature SAW sensors. View Full-Text
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Liu, X.; Peng, B.; Zhang, W.; Zhu, J.; Liu, X.; Wei, M. Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors. Materials 2017, 10, 69.
Liu X, Peng B, Zhang W, Zhu J, Liu X, Wei M. Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors. Materials. 2017; 10(1):69.Chicago/Turabian Style
Liu, Xingpeng; Peng, Bin; Zhang, Wanli; Zhu, Jun; Liu, Xingzhao; Wei, Meng. 2017. "Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors." Materials 10, no. 1: 69.
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