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Article

Application of Scattering Parameters to DPL Time-Lag Parameter Estimation at Nanoscale in Modern Integration Circuit Structures

Department of Microelectronics and Computer Science—DMCS, Lodz University of Technology, 90-924 Lodz, Poland
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Academic Editor: Andras Poppe
Energies 2021, 14(15), 4425; https://doi.org/10.3390/en14154425
Received: 15 June 2021 / Revised: 28 June 2021 / Accepted: 20 July 2021 / Published: 22 July 2021
(This article belongs to the Special Issue Thermal Management and Characterization in Electronics)
This paper presents the methodology of material parameters’ estimation for the dual-phase-lag (DPL) model at the nanoscale in modern integration circuit (IC) structures. The analyses and measurements performed were used in the unique dedicated micro-electro-mechanical system (MEMS) test structure. The electric and thermal domain of this structure was analysed. Finally, the silicon dioxide (SiO2) temperature time-lag estimation procedure is presented based on the scattering parameters measured by a vector network analyser for the considered MEMS structure together with the 2-omega method. The proposed methodology has the ability to estimate the time-lag parameter with high accuracy and is also suitable for the temperature time-lag estimation for other manufacturing process technologies of ICs and other insulation materials used for integrated circuits such as silicon nitride (Si3N4), titanium nitride (TiN), and hafnium dioxide (HfO2). View Full-Text
Keywords: dual-phase-lag heat transfer model; no-mesh FDM; S-parameters measurements; scattering parameters; DPL time lag estimation; multi-domain modelling; material parameter estimation; heat transfer at the nanoscale dual-phase-lag heat transfer model; no-mesh FDM; S-parameters measurements; scattering parameters; DPL time lag estimation; multi-domain modelling; material parameter estimation; heat transfer at the nanoscale
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MDPI and ACS Style

Zubert, M.; Kulesza, Z.; Jankowski, M.; Napieralski, A. Application of Scattering Parameters to DPL Time-Lag Parameter Estimation at Nanoscale in Modern Integration Circuit Structures. Energies 2021, 14, 4425. https://doi.org/10.3390/en14154425

AMA Style

Zubert M, Kulesza Z, Jankowski M, Napieralski A. Application of Scattering Parameters to DPL Time-Lag Parameter Estimation at Nanoscale in Modern Integration Circuit Structures. Energies. 2021; 14(15):4425. https://doi.org/10.3390/en14154425

Chicago/Turabian Style

Zubert, Mariusz, Zbigniew Kulesza, Mariusz Jankowski, and Andrzej Napieralski. 2021. "Application of Scattering Parameters to DPL Time-Lag Parameter Estimation at Nanoscale in Modern Integration Circuit Structures" Energies 14, no. 15: 4425. https://doi.org/10.3390/en14154425

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